"EMCORE" installation for MOCVD growth of laser heterostructures

  • 2" - substrate rotation holder
  • High homogeneity
  • Growth of thin layers

Post-growth process: Photolithography installation

  • 2" wafer processing
  • Mesastripe photomask formation

Post-growth process: Dry ion-plasma etching

  • Mesastripe formation
  • Vertical sidewalls
  • Precise etching depth

Post-growth process: Coating deposition on laser diode facets

  • Magnetron sputtering
  • Layer thickness control
  • Antireflection/Highreflection coating

Post-growth process: Laser diode mounting and packaging

  • Die bonding
  • Precise chip position
  • Wire bonding

Test and measurement of laser diode output parameters

  • L-I, V-I characteristics
  • Beam divergence
  • Emitting spectra
  • Aging tests